Structure
MBE Technology Laboratory with Quality Control of Fabricated Structures: SIMS
About the Laboratory
The laboratory houses the MBE Double RIBER COMPACT 21 installation along with equipment for quality control of fabricated structures.
The MBE Double RIBER COMPACT 21 enables work with elements from Group III and V of the periodic table (first MBE growth chamber) and Group II-VI (second MBE growth chamber).
Currently, we use the following materials:
- In the III-V chamber: In, Al, Ga, As, Sb, Si, Be
- In the II-VI chamber: Te, In, CdI₂, Hg, CdTe, ZnTe
Thanks to our collaboration with the International Centre for Interfacing Magnetism and Superconductivity with Topological Matter (MagTop) – IF PAN, we have access to Cr and Mn cells, as well as the KSA BandIT temperature control system and a RHEED observation and recording system equipped with a camera and PC.
Quality Control Equipment
- Secondary Ion Mass Spectrometer (SIMS) – ION TOF
- HRXRD X-ray Diffractometer – Empyrean by PANalytical
- Optical Microscope with Nomarski Contrast – Olympus DS 1000
- 3D Laser Confocal Microscope – Olympus LEXT OLS 5100
This well-equipped laboratory enables the fabrication of quantum structures in both growth chambers using all available materials. High-vacuum transfer between the chambers allows for the creation of III-V and II-VI hybrid structures without exposure to the external environment.
Team:
- Dr. Michał Marchewka
- Dr. Eng. Iwona Rogalska
- Dr. Eng. Małgorzata Trzyna-Sowa
- Dr. Eng. Dawid Jarosz
- MSc Eng. Jakub Grendysa
- MSc Eng. Kinga Maś
- MSc Eng. Marta Ruszała
Scientific Laboratory for Magnetotransport at Low and Ultra-Low Temperatures
About the Laboratory
The Cryomagnetic Laboratory is equipped with a system capable of generating a magnetic field of up to 14 Tesla. By utilizing the ³He isotope, measurements can be performed at temperatures as low as 0.3K.
The laboratory conducts research on electronic transport in low-dimensional semiconductor structures (2D, 1D, 0D) fabricated in the MBE Technology Laboratory with Quality Control of Fabricated Structures: SIMS.
Team
- MSc Paweł Śliż
- MSc Eng. Piotr Krzmiński
Scientific Laboratory for Low-Temperature Luminescence
About the Laboratory
The laboratory conducts luminescence measurements at low temperatures down to 4.2K.
The Low-Temperature Luminescence Laboratory enables precise quality control of examined structures by analyzing the energy state positions, which allows for the determination of the optical properties of the studied materials.
Team:
- Dr. Renata Wojnarowska-Nowak
- MSc Eng. Marta Ruszała
- MSc Eng. Anna Juś
Technology Laboratory for Nanolithography and Photolithography
About the Laboratory
The Photo and Nanolithography Technology Laboratory is located in clean rooms and is divided into two workstations.
The first workstation for nanolithography utilizes a scanning electron microscope equipped with an additional ion cathode (a dual-beam microscope) along with a dedicated control system from Raith. This system enables the fabrication of nano-patterns using two methods:
- Electron beam lithography combined with chemical etching (wet etching).
- Ion beam lithography, also known as dry etching.
The second workstation is dedicated to classical photolithography using ultraviolet light. The system includes:
- A spin coater for applying photoresists (light-sensitive emulsions).
- A hot plate for photoresist curing.
- A mask aligner for sample alignment and exposure.
- A developing system for post-exposure processing.
Team:
- Dr. Dariusz Płoch
- Dr. Eng. Ewa Bobko
- MSc Eng. Piotr Krzemiński
- MSc Eng. Anna Juś